Resonant Varifocal Micromirror with Piezoresistive Focus Sensor
نویسندگان
چکیده
منابع مشابه
Resonant Varifocal Micromirror with Piezoresistive Focus Sensor
This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to monitor the focal length of the varifocal mirror. The device is made of a silicon-on-insulator (...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2016
ISSN: 2072-666X
DOI: 10.3390/mi7040057